May 25, 2026  
Rensselaer Catalog 2025-2026 
    
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Rensselaer Catalog 2025-2026

ECSE 6307 - Integrated Circuit Metrology and Inspection

In this survey level course students learn common metrology and inspection techniques for semiconductor manufacturing and yield enhancement. Students evaluate multiple techniques including optical and scanning electronic microscope (SEM) as well as automated techniques, for different stages of manufacturing from wafer processes to chip packaging.

Prerequisite or Corequisite: None.

When Offered: AVAILABILITY OF INSTRUCTOR

Graded: GRADED

Credit Hours: 1