ECSE 6240 - VLSI Fabrication Technology

Fabrication technology for silicon and gallium arsenide integrated circuits with emphasis on sub-micron structures. Topics include epitaxy, diffusion, binary and ternary phase diagrams, grown and deposited oxides and nitrides, polysilicon and silicide technology, single-and multi-metal systems, plasma and chemical etching, ion milling photo, e-beam and X-ray lithography.

Prerequisite or Corequisite: Prerequisite: ECSE 4250 or equivalent.

When Offered: AVAILABILITY OF INSTRUCTOR

Graded: GRADED

Credit Hours: 3