CHME 4600 - Introduction to Semiconductor Processing

The basic processes of fabrication of silicon-based semiconductor devices with emphasis on the chemical principles and systems involved. Topics include materials preparation, oxide growth, lithography, diffusion, ion implantation, epitaxial growth, chemical-vapor deposition, vacuum deposition, reactive ion etching, and packaging technologies. Fabrication of both bipolar and FET devices is discussed with emphasis on manufacturing process flow and control. Process design methodology.

Prerequisite or Corequisite: Prerequisite: senior standing in chemical engineering or permission of instructor.

When Offered: FALL TERM ANNUALLY

Graded: GRADED

Credit Hours: 3