Master of Science in Semiconductor Technology

The Master of Science in Semiconductor Technology is a non-thesis post-bachelor’s degree program intended for those who wish to enter the semiconductor industry upon completion or engage in advanced research. The program is designed to reflect the broad range of needs and the interdisciplinary nature of the semiconductor field. The program includes core areas such as Semiconductor Devices and Processing, Circuits and Systems Design, and Power Electronics. The degree requires a set of semiconductor courses from the core areas and interdisciplinary elective courses. Students entering the program will typically hold an accredited bachelor’s degree in engineering or science, e.g., Electrical, Computer and Systems, Chemical, Materials, Mechanical, or Industrial Engineering, as well as Computer Science, Chemistry, or Physics.

Program Requirements

Students pursuing the M.S. in Semiconductor Technology must complete the following requirements:

30 total credits of approved graduate course work ¹
At least 18 credits taken at the 6000-level
Up to 12 credits taken at the 4000 (for co-listed 4xxx/6xxx courses, program students are expected to take the 6000-level version of the course)
6 credits taken from the list of common core courses
A minimum of 6 credits taken from the list of specialized core courses
6 to 18 credits taken from interdisciplinary courses
Optional up to 6 master’s project credits²
Optional up to 6 transfer credits
Optional up to 3 credits of Independent Study
No 1000- or 2000-level courses may be applied toward the degree.

Students who do not have adequate preparation for their chosen area of specialization may need to take background courses in addition to the 30-credit-hour requirement.

Footnotes

1. With prior written approval from the Graduate Program Director, special topics courses (e.g., ECSE 496X or ECSE 696X) may be used to fulfill certain course requirements.

2. A master’s project in the semiconductor area, with faculty supervision and evaluation, is optional. It may be fulfilled or partially fulfilled by an internship or Co-Op at a semiconductor company. Such an experience must be planned with the approval of the Graduate Program Director. A comprehensive report prepared at the conclusion of an internship or Co-Op or a similar practical experience must be endorsed by the student’s supervisor at the company/organization and evaluated and approved by the Graduate Program Director.

Semiconductor Technology Courses

To acquire a breadth of experience, masters degree students complete the requisite credits of core and interdisciplinary courses taken from interdisciplinary courses listed below. Sufficient courses are provided so that alternate selections are available for those who have previously completed the some core courses. Course offerings change frequently to keep pace with rapid advancement in the field; some courses are delivered in alternate years. Please see the ECSE Web site for the most current information

Common Core Courses:

ECSE 6300 - Integrated Circuit Fabrication Laboratory Credit Hours: 3
ECSE 696X - Topics Course for Semiconductor Technology - Credit Hours: 3

Specialized Core Courses for Semiconductor Devices and Processing:

CHME 4600 - Introduction to Semiconductor Processing Credit Hours: 3
or
ECSE 4250 - Integrated Circuit Processes and Design Credit Hours: 3
or
MTLE 4160 - Semiconducting Materials Credit Hours: 3
ECSE 6200 - Semiconductor Device Characterization Credit Hours: 3
ECSE 6210 - Advanced Device Concepts Credit Hours: 3
ECSE 6220 - Physical Foundations of Solid-State Devices Credit Hours: 3
ECSE 6230 - Semiconductor Devices and Models I Credit Hours: 3
ECSE 6240 - VLSI Fabrication Technology Credit Hours: 3
ECSE 6270 - Optoelectronics Credit Hours: 3
ECSE 6290 - Semiconductor Devices and Models II Credit Hours: 3

Specialized Core Courses for Circuit and System Design:

(no more than one 4000-level course may be chosen)

ECSE 4030 - Analog IC Design Credit Hours: 3
ECSE 4040 - Digital Electronics Credit Hours: 3
ECSE 4080 - Semiconductor Power Electronics Credit Hours: 3
ECSE 4220 - VLSI Design Credit Hours: 3
ECSE 6090 - Advanced Power Electronics Credit Hours: 3
ECSE 6200 - Semiconductor Device Characterization Credit Hours: 3
ECSE 6230 - Semiconductor Devices and Models I Credit Hours: 3
ECSE 6260 - Semiconductor Power Devices Credit Hours: 3
ECSE 6310 - Fundamentals of RF/Microwave Engineering Credit Hours: 3
ECSE 6320 - Advanced Computer Systems Credit Hours: 3
ECSE 6680 - Advanced VLSI Design Credit Hours: 3
ECSE 6700 - Computer Architecture Prototyping with FPGA’s Credit Hours: 3

Specialized Core Courses for Power Electronics:

(no more than one 4000-level course may be chosen)

ECSE 4030 - Analog IC Design Credit Hours: 3
ECSE 4080 - Semiconductor Power Electronics Credit Hours: 3
ECSE 6090 - Advanced Power Electronics Credit Hours: 3
ECSE 6200 - Semiconductor Device Characterization Credit Hours: 3
ECSE 6230 - Semiconductor Devices and Models I Credit Hours: 3
ECSE 6260 - Semiconductor Power Devices Credit Hours: 3

Interdisciplinary Courses:

CHME 4011 - Semiconductor Electrochemistry Credit Hours: 3
or
CHME 6011 - Semiconductor Electrochemistry Credit Hours: 3
CHME 4050 - Chemical Process Design: Fundamentals Credit Hours: 3
or
CHME 4060 - Chemical Process Design: Applications Credit Hours: 3
ISYE 4210 - Design and Analysis of Supply Chains Credit Hours: 3
or
ISYE 6600 - Design of Manufacturing System Supply Chains Credit Hours: 3
MANE 4730 - Heat Transfer Credit Hours: 3
or
MANE 4790 - Advanced Heat Transfer Credit Hours: 3
or
MANE 6790 - Advanced Heat Transfer Credit Hours: 3
MANE 6630 - Conduction Heat Transfer Credit Hours: 3
or
MANE 6640 - Radiation Heat Transfer Credit Hours: 3
or
MANE 6650 - Convective Heat Transfer Credit Hours: 3
MTLE 4440 - Thin Films Credit Hours: 3
or
MTLE 6440 - Thin Films Credit Hours: 3
MTLE 4200 - Electrical and Optical Properties of Materials Credit Hours: 4
MANE 6460 - Fracture Mechanics and Fatigue of Materials Credit Hours: 3
MTLE 6120 - Advanced Electronic Properties of Materials Credit Hours: 4
ENGR 6120 - Advanced Manufacturing Processes and Systems Credit Hours: 4
ISYE 6780 - Introduction to Optimization Credit Hours: 4
MTLE 6430 - Materials Characterization Credit Hours: 3
PHYS 6710 - Theory of Solids I Credit Hours: 3

Advanced Undergraduate Foundational Courses:

ECSE 4030 - Analog IC Design Credit Hours: 3
ECSE 4040 - Digital Electronics Credit Hours: 3
ECSE 4050 - Advanced Electronic Circuits Credit Hours: 3
ECSE 4080 - Semiconductor Power Electronics Credit Hours: 3
ECSE 4220 - VLSI Design Credit Hours: 3
ECSE 4250 - Integrated Circuit Processes and Design Credit Hours: 3
or
CHME 4600 - Introduction to Semiconductor Processing Credit Hours: 3
or
MTLE 4160 - Semiconducting Materials Credit Hours: 3
ECSE 4310 - Fundamentals of RF/Microwave Engineering Credit Hours: 3
or
ECSE 6310 - Fundamentals of RF/Microwave Engineering Credit Hours: 3
ECSE 4320 - Advanced Computer Systems Credit Hours: 3
or
ECSE 6320 - Advanced Computer Systems Credit Hours: 3
ECSE 4370 - Introduction to Optoelectronics Technology Credit Hours: 3
ECSE 4720 - Solid-State Physics Credit Hours: 4
or
PHYS 4720 - Solid-State Physics Credit Hours: 4
ECSE 4770 - Computer Hardware Design Credit Hours: 3
ECSE 4780 - Advanced Computer Hardware Design Credit Hours: 3
ECSE 4790 - Microprocessor Systems Credit Hours: 3

Optional Master’s Projects

A master’s project (XXXX 6980) in the semiconductor area, with faculty supervision and evaluation, from an appropriate branch of engineering or science.
A design project: a 1 credit-hour course on an introduction to the physical layout of circuits either through Cadence or open-source software, 3 credits for design and tape out (through the eFabless program or a semiconductor company program) for a given device or system approved by a faculty advisor, and 2 credits for testing, characterization, report, and presentation.
An internship or Co-Op at a semiconductor company with a comprehensive report endorsed by the student’s supervisor at the company, and evaluated and approved by the Graduate Program Director. This may take place immediately before or during or immediately after the course work of the M.S. study.

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