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Nov 14, 2024
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MTLE 6400 - Vacuum Techniques Principles and practice of producing, measuring, and using pressures from atmospheric down to 10-15 atmospheres. Gas kinetics and flow of gases at low pressures. Basic vacuum system calculations. System design and leak detection. Physical and chemisorption of gases. Generation of clean surfaces and study of reactions on them.
When Offered: Spring term.
Credit Hours: 3
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