Jun 22, 2024  
Rensselaer Catalog 2007-2008 
Rensselaer Catalog 2007-2008 [Archived Catalog]

Add to Portfolio (opens a new window)

CHME 4600 - Introduction to Semiconductor Processing

The basic processes of fabrication of silicon-based semiconductor devices with emphasis on the chemical principles and systems involved. Topics include materials preparation, oxide growth, lithography, diffusion, ion implantation, epitaxial growth, chemical-vapor deposition, vacuum deposition, reactive ion etching, and packaging technologies. Fabrication of both bipolar and FET devices is discussed with emphasis on manufacturing process flow and control. Process design methodology.

Prerequisites/Corequisites: Prerequisite: senior standing in chemical engineering or permission of instructor.

When Offered: Fall term annually.

Credit Hours: 3

Add to Portfolio (opens a new window)