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Dec 27, 2024
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MTLE 6300 - Integrated Circuit Fabrication Laboratory
Theory and practice of IC fabrication in a research laboratory environment. Test chips are fabricated and the resulting devices and circuits evaluated. Processes and fabrication equipment studied and used include oxidation/diffusion, CVD reactors, photolithography, plasma etching, vacuum evaporator, ion implantation, etc. Instruments used in process monitoring and final testing include thin film profilometer, ellipsometer, resistivity probe, scanning electron microscope, capacitance-voltage system, etc. The fundamentals of hazardous material handling and clean room procedures are studied.
Prerequisites/Corequisites: Prerequisite: ECSE 4250 or equivalent.
When Offered: Spring term annually.
Cross Listed: ECSE 6300 . Students cannot obtain credit for both this course and ECSE 6300 .
Credit Hours: 3
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