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Dec 21, 2024
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ECSE 6240 - VLSI Fabrication Technology
Fabrication technology for silicon and gallium arsenide integrated circuits with emphasis on sub-micron structures. Topics include epitaxy, diffusion, binary and ternary phase diagrams, grown and deposited oxides and nitrides, polysilicon and silicide technology, single-and multi-metal systems, plasma and chemical etching, ion milling photo, e-beam and X-ray lithography.
Prerequisites/Corequisites: Prerequisite: ECSE 4250 or equivalent.
When Offered: Spring term even-numbered years.
Credit Hours: 3
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