Jan 21, 2020  
Rensselaer Catalog 2018-2019 
Rensselaer Catalog 2018-2019 [Archived Catalog]

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MTLE 6300 - Integrated Circuit Fabrication Laboratory

Theory and practice of IC fabrication in a research laboratory environment. Test chips are fabricated and the resulting devices and circuits evaluated. Processes and fabrication equipment studied and used include oxidation/diffusion, CVD reactors, photolithography, plasma etching, vacuum evaporator, ion implantation, etc. Instruments used in process monitoring and final testing include thin film profilometer, ellipsometer, resistivity probe, scanning electron microscope, capacitance-voltage system, etc. The fundamentals of hazardous material handling and clean room procedures are studied.

Prerequisites/Corequisites: Prerequisite: ECSE 4250 or equivalent.

When Offered: Spring term annually.

Cross Listed: Cross listed as ECSE 6300. Students cannot obtain credit for both this course and ECSE 6300.

Credit Hours: 3

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