Apr 21, 2019  
Rensselaer Catalog 2017-2018 
    
Rensselaer Catalog 2017-2018 [Archived Catalog]

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ECSE 6240 - VLSI Fabrication Technology


Fabrication technology for silicon and gallium arsenide integrated circuits with emphasis on sub-micron structures. Topics include epitaxy, diffusion, binary and ternary phase diagrams, grown and deposited oxides and nitrides, polysilicon and silicide technology, single-and multi-metal systems, plasma and chemical etching, ion milling photo, e-beam and X-ray lithography.

Prerequisites/Corequisites: Prerequisite: ECSE 4250 or equivalent.

When Offered: Spring term even-numbered years.



Credit Hours: 3



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